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Publications by Haixiong Ge

Fabrication of 5nm Linewidth and 14nm Pitch Features by Nanoimprint Lithography

Applied Physics Letters

English

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Fabrication and Replication of Re-Entrant Structures by Nanoimprint Lithography Methods

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

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Nanoimprint Lithography: Full Wafer Replication of Nanometer Features

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Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography

Journal of Photopolymer Science and Technology

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Metal Hierarchical Patterning by Direct Nanoimprint Lithography

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Wafer Scale Coating of Polymer Cantilever Fabricated by Nanoimprint Lithography

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Advanced Solutions for Nanoimprint Lithography

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Crystallization of Poly(ethylene Oxide) Patterned by Nanoimprint Lithography

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Solid State Microcavity Dye Lasers Fabricated by Nanoimprint Lithography

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Nanoimprint Lithography and Future Patterning for Semiconductor Devices

Journal of Micro/ Nanolithography, MEMS, and MOEMS

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