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Publications by In-Kyun Shin
Analytic Estimation and Minimization of Line Edge Roughness in Electron-Beam Lithography
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Related publications
Electron Beam Lithography System.
Journal of the Japan Society of Precision Engineering
Precision Analysis of Electron Beam Lithography
IEEJ Transactions on Electronics, Information and Systems
Electronic Engineering
Electrical
Special Section Guest Editorial: Line-Edge Roughness
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Multiple-Beam Interference Lithography With Electron Beam Written Gratings
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Three-Dimensional in Situ Electron Beam Lithography Using Water Ice
Nano Letters
Materials Science
Condensed Matter Physics
Mechanical Engineering
Nanoscience
Bioengineering
Nanotechnology
Chemistry
Effects of Fast Secondary Electrons to Low-Voltage Electron Beam Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Electron Beam Sensitivity Study of the Los Alamos Advanced Free-Electron Laser Beam Line
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
High Energy Physics
Instrumentation
Nuclear
Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies
Nanodevice Fabrication Technologies With Advanced High Resolution Electron Beam Lithography Systems
Nanoindustry Russia
