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Publications by J. Gobrecht
Multiple-Beam Interference Lithography With Electron Beam Written Gratings
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Effects of Fast Secondary Electrons to Low-Voltage Electron Beam Lithography
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Prototype of Electron Source With Magnetic Beam Rotation for Electron Beam Technologies
NAUCHNOE PRIBOROSTROENIE
