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Publications by J. L. Shohet

Measurements of Schottky Barrier at the Low-K SiOC:H/Cu Interface Using Vacuum Ultraviolet Photoemission Spectroscopy

Applied Physics Letters

English

Effects of Vacuum Ultraviolet Irradiation on Trapped Charges and Leakage Currents of Low-K Organosilicate Dielectrics

Applied Physics Letters

English

Charge Trapping Within UV and Vacuum UV Irradiated Low-K Porous Organosilicate Dielectrics

Journal of the Electrochemical Society

Condensed Matter Physics

Electrochemistry

Materials Chemistry

Magnetic Materials

Renewable Energy

the Environment

English

Effect of Vacuum Ultraviolet and Ultraviolet Irradiation on Mobile Charges in the Bandgap of Low-K-Porous Organosilicate Dielectrics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Thin‐oxide Charging Damage to Microelectronic Test Structures in an Electron‐cyclotron‐resonance Plasma

Applied Physics Letters

English

Plasma Vacuum Ultraviolet Emission in an Electron Cyclotron Resonance Etcher

Applied Physics Letters

English

Guided Modes and Loss in a Plasma-Filled Bragg Waveguide

Journal of Applied Physics

English