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Publications by J. Murota

Atomic Layer-By-Layer Epitaxy of Silicon and Germanium Using Flash Heating in CVD

Le Journal de Physique IV
1995English

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Formation of InGaAs Fins by Atomic Layer Epitaxy on InP Sidewalls

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Single Atomic Layer Ferroelectric on Silicon

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Silicon Diffusion Control in Atomic-Layer-Deposited Al2O3/La2O3/Al2O3 Gate Stacks Using an Al2O3 Barrier Layer

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Suppression of Ion-Implantation Induced Porosity in Germanium by a Silicon Dioxide Capping Layer

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Atomic-Layer Level Control in SiC Crystal Growth Using Gas Source Molecular Beam Epitaxy.

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