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Publications by J.A. Voorthuyzen
Investigation of Attractive Forces Between PECVD Silicon Nitride Microstructures and an Oxidized Silicon Substrate
Sensors and Actuators, A: Physical
Surfaces
Electronic Engineering
Alloys
Condensed Matter Physics
Instrumentation
Metals
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
A Theoretical Analysis of the Electret Air-Gap Field-Effect Structure for Sensor Applications
Sensors and Actuators
