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Publications by Julius Joseph Santillan

Alternative Developer Solutions and Processes for EUV and ArFi Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2019English

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EUV Lithography and Exposure Tool.

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EUV Light Sources for Next-Gen Lithography

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Fabrication and Testing of Optics for EUV Projection Lithography

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Progress in EUV Resists Towards High-Na EUV Lithography

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Approach to EUV Lithography Simulation

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Evaluation of Resist Capability for EUV Lithography

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Development of Source System for EUV Lithography.

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Secondary Electrons in EUV Lithography

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