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Publications by K. Chew

Effects of Microwave Power on the Structural and Emission Properties of Hydrogenated Amorphous Silicon Carbide Deposited by Electron Cyclotron Resonance Chemical Vapor Deposition

Journal of Applied Physics
AstronomyPhysics
2001English

Related publications

Hydrogenated Silicon Carbide Thin Films Prepared With High Deposition Rate by Hot Wire Chemical Vapor Deposition Method

Journal of Coatings
2014English

Structure and Electrical Properties of Hydrogenated Amorphous Silicon Carbide Prepared by Plasma CVD Method.

Journal of Society of Materials Engineering for Resources of Japan
1991English

Doping of Amorphous and Microcrystalline Silicon Films Deposited at Low Substrate Temperatures by Hot-Wire Chemical Vapor Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2001English

Defects in Silicon Carbide Grown by Fluorinated Chemical Vapor Deposition Chemistry

Physica B: Condensed Matter
Electronic EngineeringCondensed Matter PhysicsOpticalElectricalMagnetic MaterialsElectronic
2018English

Kinetics and Compositional Dependence on the Microwave Power and SiH[sub 4]/N[sub 2] Flow Ratio of Silicon Nitride Deposited by Electron Cyclotron Resonance Plasmas

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
1994English

Plasma Enhanced Chemical Vapour Deposition of Hydrogenated Amorphous Silicon at Atmospheric Pressure

Plasma Sources Science and Technology
Condensed Matter Physics
2003English

Optical Properties of Hydrogenated Amorphous Silicon

Journal of Applied Physics
AstronomyPhysics
1986English

Electron‐emission‐enhanced Diamond Nucleation on Si by Hot Filament Chemical Vapor Deposition

Applied Physics Letters
AstronomyPhysics
1996English

Effects of Sr/Ti Ratio on the Step Coverage of SrTiO3Thin Films Fabricated Using Electron Cyclotron Resonance Plasma Enhanced Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
EngineeringAstronomyPhysics
2001English

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