Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Keith H. Chung
Chlorine Etching for In-Situ Low-Temperature Silicon Surface Cleaning for Epitaxy Applications
Related publications
Low Temperature Silicon-Based Epitaxy for Solar Cells Applications
Surface Roughening During Low Temperature Si(100) Epitaxy
Journal of Applied Physics
Astronomy
Physics
Low Temperature SF6/O2ECR Plasma Etching for Polysilicon Gates
Ultra-Low Reflective Micro-Structures Fabricated by One-Step Advanced Silicon Etching on Silicon Surface
Bilayer–metal Assisted Chemical Etching of Silicon Microwire Arrays for Photovoltaic Applications
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Surface Encapsulation for Low-Loss Silicon Photonics
Applied Physics Letters
Astronomy
Physics
Surface Chemistry During Plasma Etching of Silicon
Pure and Applied Chemistry
Chemistry
Chemical Engineering
Low Temperature Silicon Nitride Waveguides for Multilayer Platforms
Surface Damage Effects in Ultrasonic Cleaning of Silicon Wafers
