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Publications by Kenichi BANDOH

Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Mechanics of Materials

Mechanical Engineering

Manufacturing Engineering

English

In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor (1st Report, an Experimental Study by Using Large Model)

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Mechanics of Materials

Mechanical Engineering

Manufacturing Engineering

English

Related publications

Unsteady Thermal Stresses in a Functionally Gradient Material Plate. Influence of Heating and Cooling Conditions on Unsteady Thermal Stresses.

Transactions of the Japan Society of Mechanical Engineers Series A

English

Transient Temperature Measurements of Resist Heating Using Nanothermocouples

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Slip-Free Rapid Thermal Processing in Single Wafer Furnace

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

Electromagnetic and Thermal History During Microwave Heating

Applied Thermal Engineering

Power Technology

Manufacturing Engineering

Energy Engineering

English

Dynamic Thermal Stress in a Plate Under an Axisymmetric Heating.

Transactions of the Japan Society of Mechanical Engineers Series A

English

Thermal Uniformity of 12-In Silicon Wafer During Rapid Thermal Processing by Inverse Heat Transfer Method

IEEE Transactions on Semiconductor Manufacturing

Electronic Engineering

Condensed Matter Physics

Manufacturing Engineering

Magnetic Materials

English

Using Energy Efficient Temperature Sensor for Automatic Control of the Heating and Cooling System in the Home

Nigerian Journal of Technology

English

Cooling History of Earth’s Core With High Thermal Conductivity

Physics of the Earth and Planetary Interiors

Planetary Science

English

Experimental Study on the PMV Control of Ceiling Radiation Cooling/Heating System Using Groundwater

AIJ Journal of Technology and Design

English