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Publications by Kenneth Eng Kian Lee
the Integration of InGaP LEDs With CMOS on 200 Mm Silicon Wafers
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Optical Flatness Metrology for 300 Mm Silicon Wafers
AIP Conference Proceedings
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Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers
Influence of PE-ALD of GaP on the Silicon Wafers Quality
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Monocrystalline Silicon Carbide Wafers Processing
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Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
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Comparison Between Different Ways in Making Silicon Dioxide Layer on Silicon Wafers
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