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Publications by Kuen-Fong Hsieh

Effect of Fluoroalkyl Substituents on the Reactions of Alkylchlorosilanes With Mold Surfaces for Nanoimprint Lithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Related publications

Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography

Advanced Materials

Mechanics of Materials

Materials Science

Mechanical Engineering

English

Combined Laser Interference and Photolithography Patterning of a Hybrid Mask Mold for Nanoimprint Lithography

Journal of Nanoscience and Nanotechnology

Materials Science

Condensed Matter Physics

Biomedical Engineering

English

Advanced Solutions for Nanoimprint Lithography

Nanoindustry Russia

English

Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Plasma Fluorination of Diamond-Like Carbon Surfaces: Mechanism and Application to Nanoimprint Lithography

Mechanics of Materials

Electronic Engineering

Mechanical Engineering

Materials Science

English

Nanoimprint Lithography and Future Patterning for Semiconductor Devices

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Electronic Engineering

Condensed Matter Physics

Mechanical Engineering

Molecular Physics,

Magnetic Materials

English

Stamp Stress Analysis With Low Temperature Nanoimprint Lithography

Functional Materials

Materials Science

English

Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Selective Patterning of ZnO Nanorods on Silicon Substrates Using Nanoimprint Lithography

Nanoscale Research Letters

Materials Science

Condensed Matter Physics

English