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Publications by L. L. Tedder
Real-Time Process and Product Diagnostics in Rapid Thermal Chemical Vapor Deposition Using in Situ Mass Spectrometric Sampling
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Real-Time, in Situ Film Thickness Metrology in a 10 Torr W Chemical Vapor Deposition Process Using an Acoustic Sensor
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
In Situ Optical Diagnostics of Silicon Chemical Vapor Deposition Gas-Phase Processes
AIP Conference Proceedings
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Real-Time In-Situ Investigation of III-V Nanowire Growth Using Custom-Designed Hybrid Chemical Vapor Deposition-Tem
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Chemical Vapor Deposition of Polycrystalline Silicon in a Rapid Thermal Processor
Materials Research Society Symposium - Proceedings
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Structure Controlled Synthesis of Vertically Aligned Carbon Nanotubes Using Thermal Chemical Vapor Deposition Process
Journal of Heat Transfer
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Thermal Plasma Chemical Vapor Deposition of SiC.
ISIJ International
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Process Control in Metalorganic Chemical Vapor Deposition of CdTe
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Real-Time Monitoring of Chemical Vapor Deposition Processes: Effects of Pressure and Flow
Acta Crystallographica Section A Foundations of Crystallography
Carbon Dioxide Adsorption Using Activated Carbon via Chemical Vapor Deposition Process
Engineering Journal
Engineering
