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Publications by Li-Ting Tseng
Magnetic Properties in Α-MnO2 Doped With Alkaline Elements
Scientific Reports
Multidisciplinary
Quantitative Characterization of Absorber and Phase Defects on EUV Reticles Using Coherent Diffraction Imaging
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography
Amplitude and Phase Defect Inspection on EUV Reticles Using RESCAN
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