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Publications by M. Elwenspoek

Tailoring the Thermal Casimir Force With Graphene

Europhysics Letters
AstronomyPhysics
2011English

Nonlinearity and Hysteresis of Resonant Strain Gauges

Journal of Microelectromechanical Systems
Electronic EngineeringElectricalMechanical Engineering
1998English

Electric Field Fluctuations in Liquid Tellurium Alloys — A Hint to Bond Character

Journal of Non-Crystalline Solids
Condensed Matter PhysicsMaterials ChemistryOpticalMagnetic MaterialsCompositesElectronicCeramics
1985English

Resonating Silicon Beam Force Sensor

Sensors and Actuators
1989English

Silicon Active Microvalves Using Buckled Membranes for Actuation

English

Buckled Membranes for Microstructures

English

An Electrochemical Micro Actuator

English

The Shuffle Motor: A High Force, High Precision Linear Electrostatic Stepper Motor

English

Ambient Temperature-Gradient Compensated Low-Drift Thermopile Flow Sensor

2009English

Materials Analysis of Fluorocarbon Films for MEMS Applications

English
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