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Publications by Marcelo B Pisani
Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated With AlN Contour-Mode Resonators
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Related publications
Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators
High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing in Liquids
Elektrotechnik und Informationstechnik
Electronic Engineering
Electrical
1.05 GHz MEMS Oscillator Based on Lateral-Field-Excited Piezoelectric AlN Resonators
Nonlinear Actuation Model for Lateral Electrostatically-Actuated DC-contact RF MEMS Series Switches
Microwave and Optical Technology Letters
Electronic Engineering
Condensed Matter Physics
Electronic
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Optics
Deep SiO2etching With Al and AlN Masks for MEMS Devices
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Optimum Electromagnetic Modelling of RF MEMS Switches
Elektronika ir Elektrotechnika
Electronic Engineering
Electrical
RF MEMS Switches for Smart Antennas
Microsystem Technologies
Electronic Engineering
Condensed Matter Physics
Nanoscience
Hardware
Optical
Electrical
Architecture
Magnetic Materials
Nanotechnology
Electronic
Numerical Study for Enhancement-Mode AlN/GaN/AlN N-Polar MISFET With Self-Aligned Source/Drain Regions
Fabrication and Characterization of AlN-based Flexible Piezoelectric Pressure Sensor Integrated Into an Implantable Artificial Pancreas
Scientific Reports
Multidisciplinary
