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Publications by Mariko Isono
Study of Proximity Lithography Simulations Using Actual Measurements of Dissolution Rates in Thick Resist Films
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
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Evaluation of Resist Capability for EUV Lithography
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Transient Temperature Measurements of Resist Heating Using Nanothermocouples
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In Situ Analysis of the EUV Resist Pattern Formation During the Resist Dissolution Process
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Immersion Lithography: Topcoat and Resist Processes
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