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Evaluation of EUV Resist Performance Using Interference Lithography
doi 10.1117/12.2085803
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Date
March 13, 2015
Authors
E. Buitrago
O. Yildirim
C. Verspaget
N. Tsugama
R. Hoefnagels
G. Rispens
Y. Ekinci
Publisher
SPIE
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