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Publications by Maritza G. J. Veprek-Heijman

Role of Oxygen Impurities in Etching of Silicon by Atomic Hydrogen

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Related publications

High Aspect Ratio Etching of Atomic Force Microscope-Patterned Nitrided Silicon

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Chemical Etching of Silicon

Microscopy Today

English

A Novel Source of Atomic Hydrogen for Passivation of Defects in Silicon

Physica Status Solidi - Rapid Research Letters

Materials Science

Condensed Matter Physics

English

Thermodynamics of Impurities in Pure Iron Obtained by Hydrogen Reduction

Tetsu-To-Hagane/Journal of the Iron and Steel Institute of Japan

Condensed Matter Physics

Theoretical Chemistry

Materials Chemistry

English

Porous Silicon Produced by Metal-Assisted Etching

Journal of The Surface Finishing Society of Japan

English

Carrier Trapping by Oxygen Impurities in Molybdenum Diselenide

English

3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching

Advanced Functional Materials

Materials Science

Condensed Matter Physics

Electrochemistry

Magnetic Materials

English

Etching Figures of Silicon Crystal

The Journal of the Japanese Association of Mineralogists, Petrologists and Economic Geologists

English

Competition Between Al2O3 Atomic Layer Etching and AlF3 Atomic Layer Deposition Using Sequential Exposures of Trimethylaluminum and Hydrogen Fluoride

Journal of Chemical Physics

Theoretical Chemistry

English