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Publications by Mark J. Kushner
Predictions of Ion Energy Distributions and Radical Fluxes in Radio Frequency Biased Inductively Coupled Plasma Etching Reactors
Journal of Applied Physics
Astronomy
Physics
Consequences of Propene and Propane on Plasma Remediation of NOx
Journal of Applied Physics
Astronomy
Physics
Dynamics of a Coplanar-Electrode Plasma Display Panel. II. Cell Optimization
Journal of Applied Physics
Astronomy
Physics
The Role of Negative Ions in the Formation of Particles in Low‐pressure Plasmas
Journal of Applied Physics
Astronomy
Physics
Numerical Investigation of the Kinetics and Chemistry of Rf Glow Discharge Plasmas Sustained in He, N2, O2, He/N2/O2, He/Cf4/O2, and SiH4/NH3using a Monte Carlo‐fluid Hybrid Model
Journal of Applied Physics
Astronomy
Physics
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