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Publications by Masatoshi Kotera
Precision Analysis of Electron Beam Lithography
IEEJ Transactions on Electronics, Information and Systems
Electronic Engineering
Electrical
Related publications
Electron Beam Lithography System.
Journal of the Japan Society of Precision Engineering
Multiple-Beam Interference Lithography With Electron Beam Written Gratings
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Three-Dimensional in Situ Electron Beam Lithography Using Water Ice
Nano Letters
Materials Science
Condensed Matter Physics
Mechanical Engineering
Nanoscience
Bioengineering
Nanotechnology
Chemistry
Effects of Fast Secondary Electrons to Low-Voltage Electron Beam Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies
Nanodevice Fabrication Technologies With Advanced High Resolution Electron Beam Lithography Systems
Nanoindustry Russia
Analytic Estimation and Minimization of Line Edge Roughness in Electron-Beam Lithography
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Precision Electron Beam Polarimetry for Next Generation Nuclear Physics Experiments
International Journal of Modern Physics E
High Energy Physics
Nuclear
Astronomy
Physics
Electron Beam Lithography Using GaAs Oxidized Resist for GaAs/AlGaAs Ultrafine Structure Fabrication.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
