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Publications by Mathieu Caillau

Fifty Nanometer Lines Patterned Into Silica Using Water Developable Chitosan Bioresist and Electron Beam Lithography

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2017English

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