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Publications by Miko Elwenspoek
Wafer-Scale Fabrication of Nanoapertures Using Corner Lithography
Nanotechnology
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Materials Science
Nanoscience
Electrical
Bioengineering
Nanotechnology
Chemistry
The Μ-Flown: A Novel Device for Measuring Acoustic Flows
Sensors and Actuators, A: Physical
Surfaces
Electronic Engineering
Alloys
Condensed Matter Physics
Instrumentation
Metals
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
The Black Silicon Method II:The Effect of Mask Material and Loading on the Reactive Ion Etching of Deep Silicon Trenches
Microelectronic Engineering
Surfaces
Electronic Engineering
Condensed Matter Physics
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Films
Nanotechnology
Optics
Coatings
Stiction in Surface Micromachining
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Related publications
Thin-Film Ferroelectric Materials and Their Applications
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Thermomechanical Processing of Metallic Glasses: Extending the Range of the Glassy State
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Nickelates Enter the Scene
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Antagonistic Actuation and Stiffness Control in Soft Inflatable Robots
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Publisher Correction: Theory-Guided Design of Catalytic Materials Using Scaling Relationships and Reactivity Descriptors
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Seeing Hydrogen
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Publisher Correction: Probing Dynamics in Quantum Materials With Femtosecond X-Rays
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Chemically Diverse and Multifunctional Hybrid Organic–inorganic Perovskites
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Predicting Perfect Pores
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
A Storey of Buildings and Materials
Nature Reviews Materials
Surfaces
Optical
Energy
Materials Chemistry
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
