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Publications by Morito Akiyama
Polarity Inversion of Aluminum Nitride Thin Films by Using Si and MgSi Dopants
Scientific Reports
Multidisciplinary
Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Related publications
Structural and Optical Characterization of Pure Si-Rich Nitride Thin Films
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Characterization of Nitride Thin Films Using SEM and EDX
Acta Physica Polonica A
Astronomy
Physics
Electric Field Stiffening Effect in cOriented Aluminum Nitride Piezoelectric Thin Films
Preparation of Boron Nitride Thin Films by Using Plasma Chemical Transport of Boron.
Journal of the Surface Finishing Society of Japan
Nitrogen Function of Aluminum-Nitride Codoped ZnO Films Deposited Using Cosputter System
Journal of Materials Research
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Kinetics of TiSi2formation by Thin Ti Films on Si
Journal of Applied Physics
Astronomy
Physics
Structure of Indium Nitride Thin Films Prepared by RF-magnetron Sputtering
Acta Crystallographica Section A Foundations of Crystallography
Fabrication of Dislocation-Free Tensile Strained Si Thin Films Using Controllably Oxidized Porous Si Substrates
Applied Physics Letters
Astronomy
Physics
Design of Transition-Metal Nitride Thin Films for Thermoelectrics
Linköping Studies in Science and Technology. Dissertations