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Publications by N. Matsuzuka

Validation of X-Ray Lithography and Development Simulation System for Moving Mask Deep X-Ray Lithography

Journal of Microelectromechanical Systems

Electronic Engineering

Mechanical Engineering

English

Related publications

X-Ray Lenses Fabricated by Deep X-Ray Lithography

English

Algorithm to Derive Optimal Mask and Movement Patterns in Moving Mask Deep X-Ray Lithography (M2DXL)

IEEJ Transactions on Sensors and Micromachines

Electronic Engineering

Mechanical Engineering

English

Nano-Crystalline Diamond Films for X-Ray Lithography Mask

English

Use of Photosensitive Polyimide for Deep X‐ray Lithography

Applied Physics Letters

English

X-Ray Lithography Sources: A Review

English

Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

IEEE Photonics Technology Letters

Electronic Engineering

Molecular Physics,

Magnetic Materials

English

Laser-Produced X-Rays for Compact X-Ray Lithography and Microscopy

English

Compact Synchrotron Radiation Source AURORA for X-Ray Lithography.

English

Micro Capillary Array Chip for DNA Analysis Fabricated by Deep X-Ray Lithography

IEEJ Transactions on Sensors and Micromachines

Electronic Engineering

Mechanical Engineering

English