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Publications by O. Tabata
Validation of X-Ray Lithography and Development Simulation System for Moving Mask Deep X-Ray Lithography
Journal of Microelectromechanical Systems
Electronic Engineering
Electrical
Mechanical Engineering
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X-Ray Lenses Fabricated by Deep X-Ray Lithography
Algorithm to Derive Optimal Mask and Movement Patterns in Moving Mask Deep X-Ray Lithography (M2DXL)
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
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Nano-Crystalline Diamond Films for X-Ray Lithography Mask
Use of Photosensitive Polyimide for Deep X‐ray Lithography
Applied Physics Letters
Astronomy
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X-Ray Lithography Sources: A Review
Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography
IEEE Photonics Technology Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
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Magnetic Materials
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Laser-Produced X-Rays for Compact X-Ray Lithography and Microscopy
SPIE Newsroom
Compact Synchrotron Radiation Source AURORA for X-Ray Lithography.
SHINKU
Micro Capillary Array Chip for DNA Analysis Fabricated by Deep X-Ray Lithography
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
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