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Publications by O. Tabata

Validation of X-Ray Lithography and Development Simulation System for Moving Mask Deep X-Ray Lithography

Journal of Microelectromechanical Systems

Electronic Engineering

Mechanical Engineering

English

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X-Ray Lenses Fabricated by Deep X-Ray Lithography

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Algorithm to Derive Optimal Mask and Movement Patterns in Moving Mask Deep X-Ray Lithography (M2DXL)

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Nano-Crystalline Diamond Films for X-Ray Lithography Mask

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Use of Photosensitive Polyimide for Deep X‐ray Lithography

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X-Ray Lithography Sources: A Review

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Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

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Laser-Produced X-Rays for Compact X-Ray Lithography and Microscopy

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Compact Synchrotron Radiation Source AURORA for X-Ray Lithography.

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Micro Capillary Array Chip for DNA Analysis Fabricated by Deep X-Ray Lithography

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