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Publications by P.K. Chu

Surface Hydrogen Incorporation and Profile Broadening Caused by Sheath Expansion in Hydrogen Plasma Immersion Ion Implantation

IEEE Transactions on Plasma Science
High Energy PhysicsNuclearCondensed Matter Physics
2000English

Various Methods to Reduce Defect States in Tantalum Oxide Capacitors for DRAM Applications

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2005English

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