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Publications by P.K. Chu
Surface Hydrogen Incorporation and Profile Broadening Caused by Sheath Expansion in Hydrogen Plasma Immersion Ion Implantation
IEEE Transactions on Plasma Science
High Energy Physics
Nuclear
Condensed Matter Physics
Various Methods to Reduce Defect States in Tantalum Oxide Capacitors for DRAM Applications
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Related publications
Hydrogen-Induced Surface Blistering of Sample Chuck Materials in Hydrogen Plasma Immersion Ion Implantation
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Nitrogen Incorporation Into Hafnium Oxide Films by Plasma Immersion Ion Implantation
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Engineering
Astronomy
Physics
Magnetic Field Effect on the Sheath Thickness in Plasma Immersion Ion Implantation
Applied Physics Letters
Astronomy
Physics
Numerical Simulation of Plasma Sheath Expansion, With Applications to Plasma‐source Ion Implantation
Journal of Applied Physics
Astronomy
Physics
Surface Modification of Biomaterials Using Plasma Immersion Ion Implantation and Deposition
Interface Focus
Biochemistry
Biophysics
Biomaterials
Bioengineering
Biotechnology
Biomedical Engineering
Improved Hydrogen Ionization Rate in Enhanced Glow Discharge Plasma Immersion Ion Implantation by Enlarging the Interaction Path Using an Insulating Tube
Review of Scientific Instruments
Medicine
Instrumentation
Plasma Immersion Ion Implantation With Lithium Ions
Metal Plasma Immersion Ion Implantation and Deposition: A Review
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Plasma Immersion Surface Modification With Metal Ion Plasma
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
