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Publications by P.R. Scheeper
Investigation of Attractive Forces Between PECVD Silicon Nitride Microstructures and an Oxidized Silicon Substrate
Sensors and Actuators, A: Physical
Surfaces
Electronic Engineering
Alloys
Condensed Matter Physics
Instrumentation
Metals
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
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Chemical Interaction Between Fe and Silicon Nitride Ceramic
Journal of the European Ceramic Society
Composites
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Ceramics
Silicon Nitride Joining.
Investigation of Optical Properties of Silicon Oxynitride Films Deposited by RF PECVD Method
Materials Science-Poland
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
PECVD Silicon Nitride Passivation on Boron Emitter: The Analysis of Electrostatic Charge on the Interface Properties
Advances in OptoElectronics
Electronic Engineering
Optical
Electrical
Magnetic Materials
Electronic
Compositional Analysis of Silicon Oxide/Silicon Nitride Thin Films
Materials Science-Poland
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
A Low-Noise Silicon Nitride Nanopore Device on a Polymer Substrate
PLoS ONE
Multidisciplinary
Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
