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Publications by Pang-Shiu Chen

The CMP Process and Cleaning Solution for Planarization of Strain-Relaxed SiGe Virtual Substrates in MOSFET Applications

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

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