Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Paul Kettner
Nanoimprint Lithography: Full Wafer Replication of Nanometer Features
Related publications
Wafer Scale Coating of Polymer Cantilever Fabricated by Nanoimprint Lithography
Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Replication of Diffractive-Optical Arrays via Photocurable Nanoimprint Lithography
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Fabrication and Replication of Re-Entrant Structures by Nanoimprint Lithography Methods
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Fabrication of 5nm Linewidth and 14nm Pitch Features by Nanoimprint Lithography
Applied Physics Letters
Astronomy
Physics
Contact Electrification Induced Interfacial Reactions and Direct Electrochemical Nanoimprint Lithography in N-Type Gallium Arsenate Wafer
Chemical Science
Chemistry
Advanced Solutions for Nanoimprint Lithography
Nanoindustry Russia
Nanoimprint Lithography and Future Patterning for Semiconductor Devices
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Metal Hierarchical Patterning by Direct Nanoimprint Lithography
Scientific Reports
Multidisciplinary
