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Publications by R. Lemire

Method for Fabricating Submicron Silicide Structures on Silicon Using a Resistless Electron Beam Lithography Process

Applied Physics Letters

English

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Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies

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Electron Beam Lithography System.

Journal of the Japan Society of Precision Engineering

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Fabrication of Poly(ethylene Glycol) Hydrogel Structures for Pharmaceutical Applications Using Electron Beam and Optical Lithography

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

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Condensed Matter Physics

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Materials Chemistry

Magnetic Materials

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Sub-10-Nm Structures Written in Ultra-Thin HSQ Resist Layers Using Electron-Beam Lithography

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Method for Determination of Resists Parameters for Photonic - Integrated Circuits E-Beam Lithography on Silicon Nitride Platform

EPJ Web of Conferences

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Fabrication of Submicron Structures by Three-Dimensional Laser Lithography

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Single-Electron Transistor Structures Based on Silicon-On-Insulator Silicon Nanowire Fabrication by Scanning Probe Lithography and Wet Etching

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

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Three-Dimensional in Situ Electron Beam Lithography Using Water Ice

Materials Science

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Precision Analysis of Electron Beam Lithography

IEEJ Transactions on Electronics, Information and Systems

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