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Publications by Rob Legtenberg

Anisotropic Reactive Ion Etching of Silicon Using SF[sub 6]/O[sub 2]/CHF[sub 3] Gas Mixtures

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
1995English

The Black Silicon Method II:The Effect of Mask Material and Loading on the Reactive Ion Etching of Deep Silicon Trenches

Microelectronic Engineering
SurfacesElectronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsFilmsNanotechnologyOpticsCoatings
1995English

Stiction in Surface Micromachining

Journal of Micromechanics and Microengineering
Mechanics of MaterialsElectronic EngineeringMechanical EngineeringNanoscienceOpticalElectricalMagnetic MaterialsNanotechnologyElectronic
1996English

Thermally Excited Resonating Membrane Mass Flow Sensor

Sensors and Actuators
1989English

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