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Publications by Ryutaro Maeda

Ultra-High Strain in Epitaxial Silicon Carbide Nanostructures Utilizing Residual Stress Amplification

Applied Physics Letters
AstronomyPhysics
2017English

High-Efficient Chip to Wafer Self-Alignment and Bonding for Flexible and Size-Free MEMS-IC Integration

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2012English

A Pneumatically-Actuated Three-Way Microvalve Fabricated With Polydimethylsiloxane Using the Membrane Transfer Technique

Journal of Micromechanics and Microengineering
Mechanics of MaterialsElectronic EngineeringMechanical EngineeringNanoscienceOpticalElectricalMagnetic MaterialsNanotechnologyElectronic
2000English

Electron Microscopic Observation of the Microstructure of Sol-Gel Derived PZT Thin Film

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of MaterialsAlloysMaterials ChemistryCondensed Matter PhysicsMetals
2000English

A Measurement Method for the Power Generation Characteristics of Piezoelectric Elements

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2004English

Ultra-Fine Pitch Electrical Feed Through Using Si Deep Etching and Bonding Wafer

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2002English

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