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Publications by S. M. Ma
Thin‐oxide Charging Damage to Microelectronic Test Structures in an Electron‐cyclotron‐resonance Plasma
Applied Physics Letters
Astronomy
Physics
Related publications
Plasma Vacuum Ultraviolet Emission in an Electron Cyclotron Resonance Etcher
Applied Physics Letters
Astronomy
Physics
Plasma Expansion From a Dielectric Electron Cyclotron Resonance Source
Physica Scripta
Condensed Matter Physics
Optics
Molecular Physics,
Mathematical Physics
Atomic
Astronomy
Physics
Electron Cyclotron Resonance Microwave Ion Sources for Thin Film Processing
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
High Energy Physics
Instrumentation
Nuclear
Hydrogen-Free SiCN Films Obtained by Electron Cyclotron Resonance Plasma
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)
Kakuyūgō kenkyū
Electron Cyclotron Resonance Plasma Enhanced Direct Current Sputtering Discharge With Magnetic-Mirror Plasma Confinement
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Cu Deposition Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma Source
Operation of an Electron-Cyclotron-Resonance Ion Source With Supplemental Electron Injection
Physical Review Special Topics - Accelerators and Beams
Beam-Induced Damage to Thin Specimens in an Intense Electron Probe
Microscopy and Microanalysis
Instrumentation
