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Publications by S. Petersson
Impurity Incorporation During Rf Sputtering of Silicon Oxide Layers
Physica Status Solidi (a)
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Vanadium Oxide Thin Films Obtained by Thermal Annealing of Layers Deposited by RF Magnetron Sputtering at Room Temperature
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Le Journal de Physique Colloques
Resonant Rutherford Backscattering Studies of Cerium Oxide Thin Films Deposited by RF Sputtering
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Energy-Dependent RBS Channelling Analysis of Epitaxial ZnO Layers Grown on ZnO by RF-Magnetron Sputtering
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Characterization of Silver Oxide Films Formed by Reactive RF Sputtering at Different Substrate Temperatures
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Effect of Ion Irradiation on Vanadium Oxide Thin Films Deposited by Reactive RF Sputtering Technique
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Fabrication of Tin Oxide Thin Film Transistors by RF Magnetron Sputtering Using Sn/SnO Composite Target
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Effect of Pulsed Magnetron Sputtering Process for the Deposition of Thin Layers of Nickel and Nickel Oxide
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