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Publications by Sang-In Lee
A Novel and Low Thermal Budget Planarization Scheme for Pre-Metal Dielectric Using Electron-Beam Cured HSQ (Hydrogen Silsesquioxane) in STC (Stacked Capacitor) DRAM
Related publications
Comparative Study of Thermally Cured and Electron-Beam-Exposed Hydrogen Silsesquioxane Resists
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Thin Electron Beam Defined Hydrogen Silsesquioxane Spacers for Vertical Nanowire Transistors
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Dielectric Characteristics of Low-Permittivity Silicate Using Electron Beam Direct Patterning for Intermetal Dielectric Applications
Applied Physics Letters
Astronomy
Physics
Sub-10-Nm Structures Written in Ultra-Thin HSQ Resist Layers Using Electron-Beam Lithography
Production of Nanopowders of Metal Oxides Using Pulsed Electron Beam in Low Pressure Gas
ISRN Nanomaterials
The Effect of Ch₄ Plasma Treatment on Low Dielectric HSQ Films
Ceramics - Silikaty
Analytical Chemistry
Theoretical Chemistry
Materials Chemistry
Chemical Engineering
Composites
Ceramics
Physical
Metal-Dielectric-Metal Plasmonic Resonators for Active Beam Steering in the Infrared
Optics Letters
Optics
Atomic
Molecular Physics,
Electron Beam Dynamics for a Low-Energy Electron Linac
Dual Model Describing Effects of Evaporated Metal Gate on Low-K Dielectric Methylsilsesquioxane in Metal Oxide Semiconductor Capacitor Structure
Semiconductor Physics, Quantum Electronics and Optoelectronics
Electronic Engineering
Optics
Molecular Physics,
Optical
Electrical
Atomic
Magnetic Materials
Electronic
