Dual Model Describing Effects of Evaporated Metal Gate on Low-K Dielectric Methylsilsesquioxane in Metal Oxide Semiconductor Capacitor Structure
Semiconductor Physics, Quantum Electronics and Optoelectronics - Ukraine
doi 10.15407/spqeo6.04.524
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December 11, 2003
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National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)