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Publications by Satoshi Harada
Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Related publications
Fabrication of Imprint Mold With Nanotrench Patterns by Edge Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Nanoscale Patterning of Magnetic Islands by Imprint Lithography Using a Flexible Mold
Applied Physics Letters
Astronomy
Physics
Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies
Impact of Imprint Pressure on Residual Layer Thickness in UV Nanoimprint Lithography
DEStech Transactions on Computer Science and Engineering
Fabrication of Spin-Transfer Nano-Oscillator by Colloidal Lithography
Journal of Nanomaterials
Materials Science
Nanotechnology
Nanoscience
Metal Hierarchical Patterning by Direct Nanoimprint Lithography
Scientific Reports
Multidisciplinary
Fabrication of Submicron Structures by Three-Dimensional Laser Lithography
JETP Letters
Astronomy
Physics
Fabrication of Cantilever Based Mass Sensors Integrated With CMOS Using Direct Write Laser Lithography on Resist
Nanotechnology
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Materials Science
Nanoscience
Electrical
Bioengineering
Nanotechnology
Chemistry
