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Publications by Seiji Inumiya

Characterization of High-K Materials for the Advancement of High-Speed ULSIs

e-Journal of Surface Science and Nanotechnology
SurfacesMechanics of MaterialsCondensed Matter PhysicsInterfacesNanoscienceBioengineeringFilmsBiotechnologyCoatingsNanotechnology
2003English

Comprehensive Understanding of PBTI and NBTI Reliability of High-K / Metal Gate Stacks With EOT Scaling to Sub-1nm

2007English

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