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Publications by Shinji WAKUI

Velocity Sensor With High Frequency Band and Its Application to an Anti-Vibration Unit

Journal of the Japan Society for Precision Engineering, Contributed Papers
2005English

A Study on Vibration Isolated Condition for an Anti-Vibration Apparatus With Piezo Element and Voice Coil Motor

Journal of the Japan Society for Precision Engineering, Contributed Papers
2005English

Improvement of Isolated Table Using Auxiliary Tank

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
2009English

Image Noise Reduction Using Wide Range Tuned Mass Damper for Scanning Electron Microscope

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
2008English

Application of Modified Motional Mode Decoupling Control Scheme for a Fine-Motion Stage With Three-Degrees-Of-Freedom.

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Mechanics of MaterialsIndustrialMechanical EngineeringManufacturing Engineering
2001English

Wide Frequency Band of Pressure Feedback Using Positive Feedback for an Air Spring Type Anti-Vibration Apparatus

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Mechanics of MaterialsIndustrialMechanical EngineeringManufacturing Engineering
2006English

High-Speed Positioning Method for Fine Motion Mechanism Using a Piezo Element.

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Mechanics of MaterialsIndustrialMechanical EngineeringManufacturing Engineering
1997English

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