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Publications by Sonal Dey
Role of Ge and Si Substrates in Higher-K Tetragonal Phase Formation and Interfacial Properties in Cyclical Atomic Layer Deposition-Anneal Hf1−xZrxO2/Al2O3 Thin Film Stacks
Journal of Applied Physics
Astronomy
Physics
Related publications
Effects of Interfacial Organic Layers on Nucleation, Growth, and Morphological Evolution in Atomic Layer Thin Film Deposition
Impact of Postdeposition Annealing Upon Film Properties of Atomic Layer Deposition-Grown Al2O3 on GaN
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Silicon Diffusion Control in Atomic-Layer-Deposited Al2O3/La2O3/Al2O3 Gate Stacks Using an Al2O3 Barrier Layer
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Interfacial and Microstructural Properties of SrTiO3 Thin Films Grown on Si(001) Substrates
Journal of Applied Physics
Astronomy
Physics
Dielectric and Optical Properties of Zr Silicate Thin Films Grown on Si(100) by Atomic Layer Deposition
Journal of Applied Physics
Astronomy
Physics
Growth Process Optimization of ZnO Thin Film Using Atomic Layer Deposition
Materials Research Express
Surfaces
Alloys
Plastics
Polymers
Metals
Optical
Biomaterials
Magnetic Materials
Films
Coatings
Electronic
Crystalline SrZrO3 Deposition on Ge (001) by Atomic Layer Deposition for High-K Dielectric Applications
Journal of Applied Physics
Astronomy
Physics
Investigations of Transient Phase Formation in Ti/Si Thin Film Reaction
Journal of Applied Physics
Astronomy
Physics
Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
