Role of Ge and Si Substrates in Higher-K Tetragonal Phase Formation and Interfacial Properties in Cyclical Atomic Layer Deposition-Anneal Hf1−xZrxO2/Al2O3 Thin Film Stacks

Journal of Applied Physics - United States
doi 10.1063/1.4963166
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Related search

Effects of Interfacial Organic Layers on Nucleation, Growth, and Morphological Evolution in Atomic Layer Thin Film Deposition

English

Impact of Postdeposition Annealing Upon Film Properties of Atomic Layer Deposition-Grown Al2O3 on GaN

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2015English

Silicon Diffusion Control in Atomic-Layer-Deposited Al2O3/La2O3/Al2O3 Gate Stacks Using an Al2O3 Barrier Layer

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2015English

Interfacial and Microstructural Properties of SrTiO3 Thin Films Grown on Si(001) Substrates

Journal of Applied Physics
AstronomyPhysics
2002English

Dielectric and Optical Properties of Zr Silicate Thin Films Grown on Si(100) by Atomic Layer Deposition

Journal of Applied Physics
AstronomyPhysics
2009English

Growth Process Optimization of ZnO Thin Film Using Atomic Layer Deposition

Materials Research Express
SurfacesAlloysPlasticsPolymersMetalsOpticalBiomaterialsMagnetic MaterialsFilmsCoatingsElectronic
2016English

Crystalline SrZrO3 Deposition on Ge (001) by Atomic Layer Deposition for High-K Dielectric Applications

Journal of Applied Physics
AstronomyPhysics
2018English

Investigations of Transient Phase Formation in Ti/Si Thin Film Reaction

Journal of Applied Physics
AstronomyPhysics
2004English

Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels

2008English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy