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Publications by Stephen E. Saddow

Growth Rate Effect on 3c-SiC Film Residual Stress on (100) Si Substrates

Materials Science Forum
2010English

Mechanical Properties of 3c-SiC Films for MEMS Applications

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2007English

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