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Publications by Steven M. George

Progress and Future Directions for Atomic Layer Deposition and ALD-based Chemistry

MRS Bulletin
Materials ScienceTheoretical ChemistryCondensed Matter PhysicsPhysical
2011English

Competition Between Al2O3 Atomic Layer Etching and AlF3 Atomic Layer Deposition Using Sequential Exposures of Trimethylaluminum and Hydrogen Fluoride

Journal of Chemical Physics
MedicineTheoretical ChemistryAstronomyPhysicsPhysical
2017English

Spatial Atomic Layer Deposition for Coating Flexible Porous Li-Ion Battery Electrodes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2018English

Suppression of Inelastic Deformation of Nanocoated Thin Film Microstructures

Journal of Applied Physics
AstronomyPhysics
2004English

The Mechanical Robustness of Atomic-Layer- And Molecular-Layer-Deposited Coatings on Polymer Substrates

Journal of Applied Physics
AstronomyPhysics
2009English

Infrared Spectroscopic Study of Atomic Layer Deposition Mechanism for Hafnium Silicate Thin Films Using HfCl2[N(SiMe3)2]2 and H2O

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2004English

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