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Publications by T. Ohmi
High Quality and Low Thermal Budget Silicon Nitride Deposition Using PECVD for Gate Spacer, Silicide Block and Contact Etch Stopper
How Did the Solar Wind Structure Change Around the Solar Maximum? From Interplanetary Scintillation Observation
Annales Geophysicae
Planetary Sciences
Geology
Space
Atmospheric Science
Planetary Science
Astrophysics
Earth
Astronomy
Related publications
High‐rate, Low‐temperature Deposition of Multifunctional Nano‐crystalline Silicon Nitride Films
Journal of Information Display
Electronic Engineering
Electrical
Materials Science
Approaching Defect-Free Amorphous Silicon Nitride by Plasma-Assisted Atomic Beam Deposition for High Performance Gate Dielectric
Scientific Reports
Multidisciplinary
Low-Temperature Chemical-Vapor-Deposition of Silicon Nitride
Le Journal de Physique IV
Investigation of Attractive Forces Between PECVD Silicon Nitride Microstructures and an Oxidized Silicon Substrate
Sensors and Actuators, A: Physical
Surfaces
Electronic Engineering
Alloys
Condensed Matter Physics
Instrumentation
Metals
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing
Le Journal de Physique IV
Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition
Applied Physics Letters
Astronomy
Physics
Mitigation of UV-Induced Propagation Loss in PECVD Silicon Nitride Photonic Waveguides
Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications
Conference Papers in Energy
