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Publications by Takashi AKAHORI
Current Technology of ECR Plasma CVD.
Journal of the Surface Finishing Society of Japan
Related publications
Preparation of TiN Films by ECR Plasma CVD
Powerful Neutron Generators Based on High Current ECR Ion Sources With Gyrotron Plasma Heating
EPJ Web of Conferences
Astronomy
Physics
Structural and Electronic Properties of Nanocrystalline Silicon Thin Film Solar Cells Fabricated by Hot Wire and ECR-plasma CVD Techniques
Modelling RF-plasma Interaction in ECR Ion Sources
EPJ Web of Conferences
Astronomy
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Plasma-Enhanced CVD Dopes Carbon Into WS2
MRS Bulletin
Materials Science
Theoretical Chemistry
Condensed Matter Physics
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Thermal Plasma CVD of SiC Under Reduced Pressure
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of Materials
Alloys
Materials Chemistry
Condensed Matter Physics
Metals
Hard Carbon Film Coating by Plasma CVD.
SHINKU
Intermittent Behavior of Local Electron Temperature in a Linear ECR Plasma
Plasma and Fusion Research
Condensed Matter Physics
Preparation and Magnetic Properties of FexN From Plasma Generated by ECR Discharge.
Journal of the Magnetics Society of Japan
