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Publications by Tan Fu Lei

High Reliability Ultrathin Interpolyoxynitride Dielectrics Prepared by N[sub 2]O Plasma Annealing

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2003English

The CMP Process and Cleaning Solution for Planarization of Strain-Relaxed SiGe Virtual Substrates in MOSFET Applications

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

Soft Breakdown of Hafnium Oxynitride Gate Dielectrics

Journal of Applied Physics
AstronomyPhysics
2005English

Improvement of Polysilicon Oxide Integrity Using NF3-Annealing

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
EngineeringAstronomyPhysics
2000English

Low Contact Resistance of Poly-Plug Structure by In-Situ HF-vapour Cleaning

Electronics Letters
Electronic EngineeringElectrical
2000English

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Antagonistic Actuation and Stiffness Control in Soft Inflatable Robots

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Publisher Correction: Theory-Guided Design of Catalytic Materials Using Scaling Relationships and Reactivity Descriptors

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Seeing Hydrogen

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Publisher Correction: Probing Dynamics in Quantum Materials With Femtosecond X-Rays

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Chemically Diverse and Multifunctional Hybrid Organic–inorganic Perovskites

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Predicting Perfect Pores

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A Storey of Buildings and Materials

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