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Publications by Tatsuhiko Higashiki
Nanoimprint Lithography and Future Patterning for Semiconductor Devices
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Related publications
Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Metal Hierarchical Patterning by Direct Nanoimprint Lithography
Scientific Reports
Multidisciplinary
Combined Laser Interference and Photolithography Patterning of a Hybrid Mask Mold for Nanoimprint Lithography
Journal of Nanoscience and Nanotechnology
Materials Science
Condensed Matter Physics
Nanoscience
Bioengineering
Nanotechnology
Chemistry
Biomedical Engineering
Selective Patterning of ZnO Nanorods on Silicon Substrates Using Nanoimprint Lithography
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Advanced Solutions for Nanoimprint Lithography
Nanoindustry Russia
Patterning Poly(3-Hexylthiophene) in the Sub-50-Nm Region by Nanoimprint Lithography
IEEE Transactions on Nanotechnology
Electronic Engineering
Nanotechnology
Computer Science Applications
Electrical
Nanoscience
Confinement and Flow Dynamics in Thin Polymer Films for Nanoimprint Lithography
Applied Physics Letters
Astronomy
Physics
Nanoimprint Lithography: Full Wafer Replication of Nanometer Features
Impact of Wafer Deformation on Pattern Fabrication for Thermal Nanoimprint Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
