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Publications by Timothy J. Sommerer

Monte Carlo‐fluid Hybrid Model of the Accumulation of Dust Particles at Sheath Edges in Radio‐frequency Discharges

Applied Physics Letters

English

Translationally Hot Neutrals in Etching Discharges

Journal of Applied Physics

English

Numerical Investigation of the Kinetics and Chemistry of Rf Glow Discharge Plasmas Sustained in He, N2, O2, He/N2/O2, He/Cf4/O2, and SiH4/NH3using a Monte Carlo‐fluid Hybrid Model

Journal of Applied Physics

English