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Publications by Toshiro Hatakeyama
Theoretical Analysis on a Microwave-Discharge-Pumped KrF Excimer Lamp
IEEJ Transactions on Electronics, Information and Systems
Electronic Engineering
Electrical
Related publications
Dielectric Barrier Discharge-Driven Excimer Lamp
Journal of the Illuminating Engineering Institute of Japan (Shomei Gakkai Shi)
Electronic Engineering
Electrical
Light Source Measurement: Discharge Plasmas for Light Sources-Xe Excimer Lamp-
Journal of Plasma and Fusion Research
Photo-Etching of Polymers Using Dielectric Barrire Discharge Xe Excimer Lamp.
The Review of Laser Engineering
Excimer Lamp and Applications
The Review of Laser Engineering
Micromachining of Polyurethane (PU) Polymer Using a KrF Excimer Laser (248nm)
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
Performance of XeF/KrF Lasers Pumped by Fast Discharges
Applied Physics Letters
Astronomy
Physics
Quantification of the Breakdown Characteristics in KrF Excimer Gas
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
UV/O3 Cleaning by Xe2* Excimer Lamp
Journal of the Illuminating Engineering Institute of Japan (Shomei Gakkai Shi)
Electronic Engineering
Electrical
Development of a High-Repetition-Rate Electron-Beam-Pumped KrF Laser Amplifier
The Review of Laser Engineering
